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ファイル | 記述 | サイズ | フォーマット | |
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j.vacuum.2009.11.018.pdf | 597.91 kB | Adobe PDF | 見る/開く |
タイトル: | Molecular dynamics simulations for gas cluster ion beam processes |
著者: | Aoki, Takaaki https://orcid.org/0000-0002-5926-4903 (unconfirmed) Seki, Toshio https://orcid.org/0000-0002-0834-1657 (unconfirmed) Matsuo, Jiro https://orcid.org/0000-0003-0684-3677 (unconfirmed) |
著者名の別形: | 青木, 学聡 |
キーワード: | Cluster ion beam Molecular dynamics simulation Crater formation Surface modification |
発行日: | 24-Mar-2010 |
出版者: | Elsevier Ltd |
誌名: | Vacuum |
巻: | 84 |
号: | 8 |
開始ページ: | 994 |
終了ページ: | 998 |
抄録: | Molecular dynamics (MD) simulations of large argon clusters impacting on silicon targets were performed. The characteristics of crater formation, a typical collisional effect with large cluster impact were examined from the viewpoint of incident energy, cluster size and incident angle. The MD simulation results suggested that the condition where an incident cluster penetrates into the solid target and causes a crater is mainly dominated by the incident energy-per-atom rather than total incident energy of the cluster. Additionally, the MD simulations of sequential multiple cluster impacts and grazing-angle cluster irradiation on irregular surface structures were studied to characterize the surface modification effects with large cluster ion beam process. |
著作権等: | © 2009 Elsevier Ltd This is not the published version. Please cite only the published version. この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。 |
URI: | http://hdl.handle.net/2433/128763 |
DOI(出版社版): | 10.1016/j.vacuum.2009.11.018 |
出現コレクション: | 学術雑誌掲載論文等 |
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