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書誌情報 | ファイル |
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Diagnosis of oxidation reactions in metalorganic chemical vapor deposition of (Ba,Sr)TiO3 films by in situ Fourier transform infrared spectroscopy Momose, S; Sahara, R; Nakamura, T; Tachibana, K (2001) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 40(9B): 5501-5506 | |
Quantum chemical study on chemical vapor deposition source molecules for the deposition of (Ba,Sr)TiO3 films: Infrared band identifications by density functional calculations Nakamura, T; Tachibana, K (2001) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 40(1): 338-345 | |
Formation mechanism of strontium and titanium oxide films by metalorganic chemical vapor deposition: An isotopic labeling study using O-18(2) Nakamura, T; Momose, S; Tachibana, K (2001) JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 40(11): 6619-6622 |