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Title: Scanning probe anodization patterning of Si substrates covered with a self-assembled monolayer dependent on surface hydrophilicity
Authors: Han, Jiwon
Kasahara, Daiji
Ichii, Takashi  kyouindb  KAKEN_id
Murase, Kuniaki  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-7564-9416 (unconfirmed)
Sugimura, Hiroyuki  kyouindb  KAKEN_id
Issue Date: 2009
Publisher: A V S AMER INST PHYSICS
Journal title: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume: 27
Issue: 2
Start page: 928
End page: 933
URI: http://hdl.handle.net/2433/109242
DOI(Published Version): 10.1116/1.3043454
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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