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Title: Design and Fabrication of a Differential Capacitive Three-Axis SOI Accelerometer Using Vertical Comb Electrodes
Authors: Tsuchiya, Toshiyuki  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-7846-5831 (unconfirmed)
Hamaguchi, Hiroyuki
Sugano, Koji
Tabata, Osamu  KAKEN_id
Keywords: three-axis accelerometer
capacitive
vertical comb electrode
SOI
single crystal silicon
Issue Date: 2009
Publisher: JOHN WILEY & SONS INC
Journal title: IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING
Volume: 4
Issue: 3
Start page: 345
End page: 351
URI: http://hdl.handle.net/2433/109262
DOI(Published Version): 10.1002/tee.20416
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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