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Title: | Design and Fabrication of a Differential Capacitive Three-Axis SOI Accelerometer Using Vertical Comb Electrodes |
Authors: | Tsuchiya, Toshiyuki ![]() ![]() ![]() Hamaguchi, Hiroyuki Sugano, Koji Tabata, Osamu ![]() |
Keywords: | three-axis accelerometer capacitive vertical comb electrode SOI single crystal silicon |
Issue Date: | 2009 |
Publisher: | JOHN WILEY & SONS INC |
Journal title: | IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING |
Volume: | 4 |
Issue: | 3 |
Start page: | 345 |
End page: | 351 |
URI: | http://hdl.handle.net/2433/109262 |
DOI(Published Version): | 10.1002/tee.20416 |
Link: | Web of Science |
Appears in Collections: | Graduate School of Engineering Literature Database |

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