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| Title: | Design and Fabrication of a Differential Capacitive Three-Axis SOI Accelerometer Using Vertical Comb Electrodes |
| Authors: | Tsuchiya, Toshiyuki    https://orcid.org/0000-0002-7846-5831 (unconfirmed)Hamaguchi, Hiroyuki Sugano, Koji Tabata, Osamu |
| Keywords: | three-axis accelerometer capacitive vertical comb electrode SOI single crystal silicon |
| Issue Date: | 2009 |
| Publisher: | JOHN WILEY & SONS INC |
| Journal title: | IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING |
| Volume: | 4 |
| Issue: | 3 |
| Start page: | 345 |
| End page: | 351 |
| URI: | http://hdl.handle.net/2433/109262 |
| DOI(Published Version): | 10.1002/tee.20416 |
| Link: | Web of Science |
| Appears in Collections: | Graduate School of Engineering Literature Database |
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