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Title: Micro-hole processing of polyimide film by ultra-short laser pulses and its applications
Authors: Ohnishi, Masatoshi
Shikata, Hirokazu
Sakakura, Masaaki  kyouindb  KAKEN_id
Shimotsuma, Yasuhiko  kyouindb  KAKEN_id
Miura, Kiyotaka  kyouindb  KAKEN_id
Hirao, Kazuyuki  kyouindb  KAKEN_id
Issue Date: 2010
Publisher: SPRINGER
Journal title: APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume: 98
Issue: 1
Start page: 123
End page: 127
URI: http://hdl.handle.net/2433/109576
DOI(Published Version): 10.1007/s00339-009-5450-5
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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