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| Title: | Micro-hole processing of polyimide film by ultra-short laser pulses and its applications |
| Authors: | Ohnishi, Masatoshi Shikata, Hirokazu Sakakura, Masaaki   Shimotsuma, Yasuhiko Miura, Kiyotaka Hirao, Kazuyuki |
| Issue Date: | 2010 |
| Publisher: | SPRINGER |
| Journal title: | APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING |
| Volume: | 98 |
| Issue: | 1 |
| Start page: | 123 |
| End page: | 127 |
| URI: | http://hdl.handle.net/2433/109576 |
| DOI(Published Version): | 10.1007/s00339-009-5450-5 |
| Link: | Web of Science |
| Appears in Collections: | Graduate School of Engineering Literature Database |
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