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Title: | Micro-hole processing of polyimide film by ultra-short laser pulses and its applications |
Authors: | Ohnishi, Masatoshi Shikata, Hirokazu Sakakura, Masaaki ![]() ![]() Shimotsuma, Yasuhiko ![]() ![]() Miura, Kiyotaka ![]() ![]() Hirao, Kazuyuki ![]() ![]() |
Issue Date: | 2010 |
Publisher: | SPRINGER |
Journal title: | APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING |
Volume: | 98 |
Issue: | 1 |
Start page: | 123 |
End page: | 127 |
URI: | http://hdl.handle.net/2433/109576 |
DOI(Published Version): | 10.1007/s00339-009-5450-5 |
Link: | Web of Science |
Appears in Collections: | Graduate School of Engineering Literature Database |

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