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    Please use this identifier to cite or link to this item: http://hdl.handle.net/2433/109589
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dc.contributor.authorSuda, Junen
dc.contributor.authorWatanabe, Naokien
dc.contributor.authorFukunaga, Katsuhikoen
dc.contributor.authorKimoto, Tsunenobuen
dc.date.accessioned2010-04-19T05:59:40Z-
dc.date.available2010-04-19T05:59:40Z-
dc.date.issued2009-
dc.identifier.issn0021-4922-
dc.identifier.urihttp://hdl.handle.net/2433/109589-
dc.language.isoeng-
dc.publisherJAPAN SOCIETY APPLIED PHYSICSen
dc.titleElectrostatic-Actuated Suspended Ribbon Structure Fabricated in Single-Crystalline SiC by Selective Photoelectrochemical Etchingen
dc.typejournal article-
dc.type.niitypeJournal Article-
dc.identifier.jtitleJAPANESE JOURNAL OF APPLIED PHYSICSen
dc.identifier.volume48-
dc.identifier.issue11-
dc.relation.doi10.1143/JJAP.48.111101-
dc.textversionnone-
dc.identifier.artnum111101-
dcterms.accessRightsmetadata only access-
Appears in Collections:Graduate School of Engineering Literature Database

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