Downloads: 0
Files in This Item:
There are no files associated with this item.
Title: | In situ Gravimetric Monitoring of Thermal Decomposition and Hydrogen Etching Rates of 6H-SiC(0001) Si Face |
Authors: | Akiyama, Kazuhiro Ishii, Yasuhiro Abe, Sohei Murakami, Hisashi Kumagai, Yoshinao Okumura, Hironori Kimoto, Tsunenobu https://orcid.org/0000-0002-6649-2090 (unconfirmed) Suda, Jun Koukitu, Akinori |
Issue Date: | 2009 |
Publisher: | JAPAN SOCIETY APPLIED PHYSICS |
Journal title: | JAPANESE JOURNAL OF APPLIED PHYSICS |
Volume: | 48 |
Issue: | 9 |
Thesis number: | 095505 |
URI: | http://hdl.handle.net/2433/109597 |
DOI(Published Version): | 10.1143/JJAP.48.095505 |
Link: | Web of Science |
Appears in Collections: | Graduate School of Engineering Literature Database |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.