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Title: In situ Gravimetric Monitoring of Thermal Decomposition and Hydrogen Etching Rates of 6H-SiC(0001) Si Face
Authors: Akiyama, Kazuhiro
Ishii, Yasuhiro
Abe, Sohei
Murakami, Hisashi
Kumagai, Yoshinao
Okumura, Hironori
Kimoto, Tsunenobu  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-6649-2090 (unconfirmed)
Suda, Jun  KAKEN_id
Koukitu, Akinori
Issue Date: 2009
Publisher: JAPAN SOCIETY APPLIED PHYSICS
Journal title: JAPANESE JOURNAL OF APPLIED PHYSICS
Volume: 48
Issue: 9
Thesis number: 095505
URI: http://hdl.handle.net/2433/109597
DOI(Published Version): 10.1143/JJAP.48.095505
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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