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タイトル: Dynamic characteristics and dual control of a ball screw drive with integrated piezoelectric actuator
著者: Fujita, Tomoya
Matsubara, Atsushi  kyouindb  KAKEN_id
Kono, Daisuke  kyouindb  KAKEN_id
Yamaji, Iwao
著者名の別形: 藤田, 智哉
キーワード: Precision positioning
Dual servo control
Ball screw drive
Piezoelectric actuator
発行日: Jan-2010
出版者: Elsevier
引用: Tomoya Fujita, Atsushi Matsubara, Daisuke Kono and Iwao Yamaji. Dynamic characteristics and dual control of a ball screw drive with integrated piezoelectric actuator. Precision Engineering. 2010, 34(1), 34-42.
誌名: Precision Engineering
巻: 34
号: 1
開始ページ: 34
終了ページ: 42
抄録: This paper describes the precision continuous path tracking control by using a dual-actuated single stage. First, fine-drive mechanism and the dynamic model of the entire drive system are described. In the simulation model, the dynamic characteristic of the dual-actuated stage is investigated to see whether it can provide precise motion by using dual control. Second, the fine motion controller is designed. Adjusting the control parameters, a positioning resolution of 20 nm and a bandwidth of 260 Hz were obtained. Third, the frequency responses of coarse and fine drives are experimentally investigated. After that, the dual controller is designed based on the investigated dynamics. Finally, whether coarse motion and fine motion could work complimentarily by the dual servo is examined in the experiments. By using the simultaneous dual controller, tracking errors were reduced sufficiently compared to the single coarse control.
著作権等: Copyright © 2009 Elsevier
この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。This is not the published version. Please cite only the published version.
URI: http://hdl.handle.net/2433/123372
DOI(出版社版): 10.1016/j.precisioneng.2009.01.007
出現コレクション:学術雑誌掲載論文等

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