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| ファイル | 記述 | サイズ | フォーマット | |
|---|---|---|---|---|
| 065803.pdf | 225.65 kB | Adobe PDF | 見る/開く |
| タイトル: | The effects of displacement threshold irradiation energy on deep levels in p-type 6H-SiC |
| 著者: | Alfieri, Giovanni Kimoto, T    https://orcid.org/0000-0002-6649-2090 (unconfirmed) |
| 発行日: | 16-Feb-2011 |
| 出版者: | IOP |
| 誌名: | Journal of Physics: Condensed Matter |
| 巻: | 23 |
| 号: | 6 |
| 論文番号: | 065803 |
| 抄録: | We report on the electrical characterization, by means of deep level transient spectroscopy, of electron-irradiated Al-doped 6H-SiC epilayers. Samples were irradiated with either 116 keV, in order to displace only carbon atoms, or 400 keV. Seven deep traps, in the 0.1–1.6 eV range above the valence band, were found. The thermal stability of the detected levels was analyzed by performing an isochronal annealing series in the 100–1800 °C temperature range and the atomic structure of most of the detected traps was found to be related to C-displacement. |
| 著作権等: | © IOP Publishing 2011 この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。 This is not the published version. Please cite only the published version. |
| URI: | http://hdl.handle.net/2433/138534 |
| DOI(出版社版): | 10.1088/0953-8984/23/6/065803 |
| PubMed ID: | 21406935 |
| 出現コレクション: | 学術雑誌掲載論文等 |
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