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Title: The effects of displacement threshold irradiation energy on deep levels in p-type 6H-SiC
Authors: Alfieri, Giovanni
Kimoto, T  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-6649-2090 (unconfirmed)
Issue Date: 16-Feb-2011
Publisher: IOP
Journal title: Journal of Physics: Condensed Matter
Volume: 23
Issue: 6
Thesis number: 065803
Abstract: We report on the electrical characterization, by means of deep level transient spectroscopy, of electron-irradiated Al-doped 6H-SiC epilayers. Samples were irradiated with either 116 keV, in order to displace only carbon atoms, or 400 keV. Seven deep traps, in the 0.1–1.6 eV range above the valence band, were found. The thermal stability of the detected levels was analyzed by performing an isochronal annealing series in the 100–1800 °C temperature range and the atomic structure of most of the detected traps was found to be related to C-displacement.
Rights: © IOP Publishing 2011
この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。
This is not the published version. Please cite only the published version.
URI: http://hdl.handle.net/2433/138534
DOI(Published Version): 10.1088/0953-8984/23/6/065803
PubMed ID: 21406935
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