Files in This Item:
There are no files associated with this item.
|Title:||A three-dimensional microstructuring technique exploiting the positive photoresist property|
|Authors:||Hirai, Yoshikazu https://orcid.org/0000-0003-0835-7314 (unconfirmed)|
Tsuchiya, Toshiyuki https://orcid.org/0000-0002-7846-5831 (unconfirmed)
|Publisher:||IOP PUBLISHING LTD|
|Journal title:||JOURNAL OF MICROMECHANICS AND MICROENGINEERING|
|Link:||Web of Science|
|Appears in Collections:||Graduate School of Engineering Literature Database|
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.