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Title: A three-dimensional microstructuring technique exploiting the positive photoresist property
Authors: Hirai, Yoshikazu  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0003-0835-7314 (unconfirmed)
Sugano, Koji
Tsuchiya, Toshiyuki  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-7846-5831 (unconfirmed)
Tabata, Osamu  kyouindb  KAKEN_id
Issue Date: 2010
Publisher: IOP PUBLISHING LTD
Journal title: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume: 20
Issue: 6
Thesis number: 65005
URI: http://hdl.handle.net/2433/146624
DOI(Published Version): 10.1088/0960-1317/20/6/065005
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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