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Title: | Tensile Testing of Single-Crystal Silicon Thin Films at 600 degrees C Using Infrared Radiation Heating |
Authors: | Tsuchiya, Toshiyuki ![]() ![]() ![]() Ikeda, Tetsuro Tsunematsu, Akifumi Sugano, Koji Tabata, Osamu ![]() |
Keywords: | single-crystal silicon thin films mechanical properties tensile test plastic deformation |
Issue Date: | 2010 |
Publisher: | MYU |
Journal title: | SENSORS AND MATERIALS |
Volume: | 22 |
Issue: | 1 |
Start page: | 1 |
End page: | 11 |
URI: | http://hdl.handle.net/2433/146627 |
Link: | Web of Science |
Appears in Collections: | Graduate School of Engineering Literature Database |

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