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Title: Tensile Testing of Single-Crystal Silicon Thin Films at 600 degrees C Using Infrared Radiation Heating
Authors: Tsuchiya, Toshiyuki  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-7846-5831 (unconfirmed)
Ikeda, Tetsuro
Tsunematsu, Akifumi
Sugano, Koji
Tabata, Osamu  KAKEN_id
Keywords: single-crystal silicon
thin films
mechanical properties
tensile test
plastic deformation
Issue Date: 2010
Publisher: MYU
Journal title: SENSORS AND MATERIALS
Volume: 22
Issue: 1
Start page: 1
End page: 11
URI: http://hdl.handle.net/2433/146627
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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