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Title: Development of Amplitude-Controlled Parallel-Fatigue-Test System for Micro-Electromechanical Resonators
Authors: Ikehara, Tsuyoshi
Tsuchiya, Toshiyuki  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-7846-5831 (unconfirmed)
Keywords: fatigue test
silicon
MEMS
resonator
amplitude control
parallel test
Issue Date: 2010
Publisher: MYU
Journal title: SENSORS AND MATERIALS
Volume: 22
Issue: 1
Start page: 39
End page: 50
URI: http://hdl.handle.net/2433/146628
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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