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| Title: | Development of Amplitude-Controlled Parallel-Fatigue-Test System for Micro-Electromechanical Resonators |
| Authors: | Ikehara, Tsuyoshi Tsuchiya, Toshiyuki    https://orcid.org/0000-0002-7846-5831 (unconfirmed) |
| Keywords: | fatigue test silicon MEMS resonator amplitude control parallel test |
| Issue Date: | 2010 |
| Publisher: | MYU |
| Journal title: | SENSORS AND MATERIALS |
| Volume: | 22 |
| Issue: | 1 |
| Start page: | 39 |
| End page: | 50 |
| URI: | http://hdl.handle.net/2433/146628 |
| Link: | Web of Science |
| Appears in Collections: | Graduate School of Engineering Literature Database |
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