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    Please use this identifier to cite or link to this item: http://hdl.handle.net/2433/146629
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Title: A multiple Degrees of Freedom Equivalent Circuit for a Comb-Drive Actuator
Authors: Nishimori, Yuuki
Ooiso, Hideta
Mochizuki, Shunsuke
Fujiwara, Nobuyo
Tsuchiya, Toshiyuki  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-7846-5831 (unconfirmed)
Hashiguchi, Gen
Issue Date: 2009
Publisher: JAPAN SOCIETY APPLIED PHYSICS
Journal title: JAPANESE JOURNAL OF APPLIED PHYSICS
Volume: 48
Issue: 12
Thesis number: 124504
URI: http://hdl.handle.net/2433/146629
DOI(Published Version): 10.1143/JJAP.48.124504
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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