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タイトル: | Low-damage milling of an amino acid thin film with cluster ion beam |
著者: | Hada, Masaki Ibuki, Sachi Hontani, Yusaku Yamamoto, Yasuyuki Ichiki, Kazuya Ninomiya, Satoshi Seki, Toshio https://orcid.org/0000-0002-0834-1657 (unconfirmed) Aoki, Takaaki https://orcid.org/0000-0002-5926-4903 (unconfirmed) Matsuo, Jiro https://orcid.org/0000-0003-0684-3677 (unconfirmed) |
キーワード: | argon etching ion beam applications ion beam effects milling organic compounds positive ions surface structure thin films X-ray photoelectron spectra |
発行日: | Nov-2011 |
出版者: | American Institute of Physics |
誌名: | JOURNAL OF APPLIED PHYSICS |
巻: | 110 |
号: | 9 |
論文番号: | 094701 |
抄録: | In this work, we characterized the surface damage layer and sputtering yield of polycrystalline L-leucine films before and after irradiation with Ar cluster or monomer ion beams with x ray photoelectron spectroscopy and ellipsometry. Irradiation with Ar monomer ion beams induced heavy damage on the surface of L-leucine films, such as bond breaking and carbonization. In contrast, no significant surface damage was observed in the films irradiated with Ar cluster ion beams. The sputtering yield of L-leucine decreased dramatically with increasing fluence of monomer Ar ions and approached the value of the sputtering yield of graphite; but under irradiation with Ar cluster ion beams, the sputtering yield remained constant with fluence. The differences in sputtering yield behavior were explained in relation with the surface damage layer on organic materials. Thus, cluster ion beams could potentially be used to mill down biological materials without significant damage on the surface and could contribute to various applications in the analysis and processing of life matter. |
著作権等: | Copyright 2011 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in JOURNAL OF APPLIED PHYSICS 110, 094701 (2011) and may be found at http://link.aip.org/link/?jap/110/094701 |
URI: | http://hdl.handle.net/2433/160646 |
DOI(出版社版): | 10.1063/1.3658220 |
関連リンク: | http://link.aip.org/link/?jap/110/094701 |
出現コレクション: | 学術雑誌掲載論文等 |
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