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| File | Description | Size | Format | |
|---|---|---|---|---|
| ykogr01452.pdf | Abstract_要旨 | 269.56 kB | Adobe PDF | View/Open |
| D_Miyake_Kiyoshi.pdf | Dissertation_全文 | 17.55 MB | Adobe PDF | View/Open |
| Title: | STUDIES ON LOW-ENERGY, MASS-SEPARATED ION BEAM DEPOSITION AND REACTIVE ION BEAM ETCHING |
| Other Titles: | 質量分離された低エネルギーイオンビームによる薄膜形成およびエッチング機構に関する研究 |
| Authors: | Miyake, Kiyoshi |
| Author's alias: | 三宅, 潔 |
| Issue Date: | 23-Mar-1982 |
| Publisher: | Kyoto University |
| Conferring University: | 京都大学 |
| Degree Level: | 新制・論文博士 |
| Degree Discipline: | 工学博士 |
| Degree Report no.: | 乙第4675号 |
| Degree no.: | 論工博第1452号 |
| Conferral date: | 1982-03-23 |
| Degree Call no.: | 新制||工||535(附属図書館) |
| Examination Committee members: | (主査)教授 髙木 俊宜, 教授 川端 昭, 教授 板谷 良平 |
| Provisions of the Ruling of Degree: | 学位規則第5条第2項該当 |
| DOI: | 10.14989/doctor.r4675 |
| URI: | http://hdl.handle.net/2433/162157 |
| Appears in Collections: | 090 Doctoral Dissertation (Philosophy (Engineering)) |
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