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タイトル: Direct observation of fine structure in ion tracks in amorphous Si3N4 by TEM
著者: Nakajima, K.  kyouindb researcher_resolver
Morita, Y.
Suzuki, M.  kyouindb researcher_resolver
Narumi, K.
Saitoh, Y.
Ishikawa, N.
Hojou, K.
Tsujimoto, M.
Isoda, S.  kyouindb researcher_resolver
Kimura, K.  kyouindb researcher_resolver
著者名の別形: 木村, 健二
キーワード: C60
Ion track
Ion track
発行日: Nov-2012
出版者: Elsevier B.V
誌名: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
巻: 291
開始ページ: 12
終了ページ: 16
抄録: Thin films of amorphous Si3N4 (thickness 20 nm) were irradiated with 120–720 keV C60+, 2+ ions and observed using transmission electron microscopy (TEM). The ion track produced in an amorphous material was directly observed by TEM. For quantitative analysis, the ion tracks were also observed using high-angle annular dark field scanning transmission electron microscopy (HAADF-STEM). The observed ion track consists of a low density core (radius ∼2.5 nm) and a high density shell (width ∼2.5 nm), which is very similar to the ion tracks in amorphous SiO2 irradiated with high energy heavy ions observed by small angle X-ray scattering (SAXS). Although the observed ion tracks may be affected by surface effects, the present result indicates that TEM and HAADF-STEM have potential to observe directly the fine structures of ion tracks in amorphous materials.
著作権等: © 2012 Elsevier B.V.
この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。This is not the published version. Please cite only the published version.
URI: http://hdl.handle.net/2433/162897
DOI(出版社版): 10.1016/j.nimb.2012.09.007
出現コレクション:学術雑誌掲載論文等

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