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| ファイル | 記述 | サイズ | フォーマット | |
|---|---|---|---|---|
| 1.4802248.pdf | 487.28 kB | Adobe PDF | 見る/開く |
| タイトル: | Resolving the EH[6/7] level in 4H-SiC by Laplace-transform deep level transient spectroscopy |
| 著者: | Alfieri, G. Kimoto, T.    https://orcid.org/0000-0002-6649-2090 (unconfirmed) |
| 発行日: | 16-Apr-2013 |
| 出版者: | AIP Publishing |
| 誌名: | Applied Physics Letters |
| 巻: | 102 |
| 号: | 15 |
| 論文番号: | 152108 |
| 抄録: | We show that Laplace transform deep level transient spectroscopy (LDLTS) is an effective technique for the separation of the overlapping emission rates of the EH 6 and EH 7 levels, which are known to constitute EH[6/7] , a mid-gap level in n-type 4H-SiC. The analysis of the electron irradiation dose, electric field dependence, and the effects of carbon interstitials injection on the emission rates of EH 6 and EH 7 shows that EH 7 is dominant over EH 6 and confirms that their nature is related to a carbon vacancy. |
| 著作権等: | © 2013 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. |
| URI: | http://hdl.handle.net/2433/187951 |
| DOI(出版社版): | 10.1063/1.4802248 |
| 出現コレクション: | 学術雑誌掲載論文等 |
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