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| Title: | 金属/TiO_2/金属積層構造の抵抗スイッチング特性に対する電極材料の影響 |
| Other Titles: | Effects of electrode materials on resistive switching characteristics of Metal/TiO_2/Metal stack structures |
| Authors: | 沖元, 直樹  岩田, 達哉 西, 佑介 木本, 恒暢    https://orcid.org/0000-0002-6649-2090 (unconfirmed) |
| Author's alias: | OKIMOTO, Naoki IWATA, Tatsuya NISHI, Yusuke KIMOTO, Tsunenobu |
| Keywords: | ReRAM TiO_2 電極材料 Electrode Material |
| Issue Date: | Dec-2012 |
| Publisher: | 一般社団法人 電子情報通信学会 |
| Journal title: | 電子情報通信学会技術研究報告. SDM, シリコン材料・デバイス |
| Volume: | 112 |
| Issue: | 337 |
| Start page: | 129 |
| End page: | 132 |
| Abstract: | 上部電極/TiO_2/Pt積層構造において, 上部電極材料が抵抗スイッチング現象に与える影響について調べた. 上部電極としてPt, Ag, Alを用いた場合に, それぞれノンポーラ型, バイポーラ型, 不安定なノンポーラ型の動作を示した. Pt, Ag上部電極をカソードとして用いると類似のRS特性が確認された. このことから, Pt, AgのRSはアノード界面近傍で起こっていること示唆される. Al上部電極をカソードとして用いた場合は, フォーミングオフとなり, 続くRSも不安定であった. これは, Al/TiO_2界面で発生する酸化還元反応が影響していると考える. We have investigated the effects of the top electrode (TE) materials on the resistive switching (RS) characteristics of TE/TiO$_2$/Pt stack structures. TE/TiO2/Pt with Pt, Ag, Al as a TE showed a nonpolar, bipolar, or unstable nonpolar type RS behavior, respectivety. When TE was set as a cathode electrode, Ag-based devices showed similar characteristics to Pt-based ones. It is suggested that RS is induced near the anode. On the other hand, characteristics of Al-based devices differ from others, which the state of the devices aftter forming process showed High Resistance State (HRS) when Al was set as a cathodeelectrode. This result suggest redox reaction at Al/TiO_2 interface. |
| Rights: | copyright ©2012 by IEICE |
| URI: | http://hdl.handle.net/2433/193921 |
| Appears in Collections: | Journal Articles |
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