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Title: Derivation of effective penetration depth of femtosecond laser pulses in metal from ablation rate dependence on laser fluence, incidence angle, and polarization
Authors: Miyasaka, Yasuhiro
Hashida, Masaki  kyouindb  KAKEN_id  orcid (unconfirmed)
Nishii, Takaya
Inoue, Shunsuke  kyouindb  KAKEN_id
Sakabe, Shuji  kyouindb  KAKEN_id
Author's alias: 阪部, 周二
Issue Date: 5-Jan-2015
Publisher: American Institute of Physics
Journal title: Applied Physics Letters
Volume: 106
Issue: 1
Thesis number: 013101
Abstract: Ablation rate dependence on laser fluence for copper subjected to oblique femtosecond laser irradiation has been determined experimentally in order to investigate processing induced by oblique irradiation. A difference of ablation rate between p-polarized and s-polarized oblique irradiation is clearly observed. Effective penetration depth is defined to explain the ablation rate dependence instead of using optical penetration depth, which is treated as a key value for determining the ablation rate in conventional theory. The effective penetration depth for copper is presented in simple formulas as a function of laser incidence angle for each polarization.
Rights: © 2015 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
DOI(Published Version): 10.1063/1.4905353
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