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タイトル: Ripple formation on Si surfaces during plasma etching in Cl2
著者: Nakazaki, Nobuya
Matsumoto, Haruka
Sonobe, Soma
Hatsuse, Takumi
Tsuda, Hirotaka
Takao, Yoshinori
Eriguchi, Koji
Ono, Kouichi
著者名の別形: 中崎, 暢也
松本, 悠
園部, 蒼馬
初瀬, 巧
津田, 博隆
鷹尾, 祥典
江利口, 浩二
斧, 高一
発行日: May-2018
出版者: AIP Publishing
誌名: AIP Advances
巻: 8
号: 5
論文番号: 055027
抄録: Nanoscale surface roughening and ripple formation in response to ion incidence angle has been investigated during inductively coupled plasma etching of Si in Cl2, using sheath control plates to achieve the off-normal ion incidence on blank substrate surfaces. The sheath control plate consisted of an array of inclined trenches, being set into place on the rf-biased electrode, where their widths and depths were chosen in such a way that the sheath edge was pushed out of the trenches. The distortion of potential distributions and the consequent deflection of ion trajectories above and in the trenches were then analyzed based on electrostatic particle-in-cell simulations of the plasma sheath, to evaluate the angular distributions of ion fluxes incident on substrates pasted on sidewalls and/or at the bottom of the trenches. Experiments showed well-defined periodic sawtooth-like ripples with their wave vector oriented parallel to the direction of ion incidence at intermediate off-normal angles, while relatively weak corrugations or ripplelike structures with the wave vector perpendicular to it at high off-normal angles. Possible mechanisms for the formation of surface ripples during plasma etching are discussed with the help of Monte Carlo simulations of plasma-surface interactions and feature profile evolution. The results indicate the possibility of providing an alternative to ion beam sputtering for self-organized formation of ordered surface nanostructures.
著作権等: © Author(s) 2018. This article is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
URI: http://hdl.handle.net/2433/231937
DOI(出版社版): 10.1063/1.5017070
出現コレクション:学術雑誌掲載論文等

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