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Title: | High-energy (MeV) Al and B ion implantations into 4H-SiC and fabrication of pin diodes |
Authors: | Kimoto, Tsunenobu https://orcid.org/0000-0002-6649-2090 (unconfirmed) Miyamoto, Nao Schoner, Adolf Saitoh, Akira Matsunami, Hiroyuki Asano, Katsunori Sugawara, Yoshitaka |
Issue Date: | 1-Apr-2002 |
Publisher: | American Institute of Physics |
Citation: | T. Kimoto et al., J. Appl. Phys. 91, 4242-4248 (2002) |
Journal title: | Journal of Applied Physics |
Volume: | 91 |
Issue: | 7 |
Start page: | 4242 |
End page: | 4248 |
Rights: | Copyright 2002 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. |
URI: | http://hdl.handle.net/2433/24202 |
DOI(Published Version): | 10.1063/1.1459096 |
Link: | Web of Science |
Related Link: | http://link.aip.org/link/?jap/91/4242 |
Appears in Collections: | Journal Articles |
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