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Title: High-energy (MeV) Al and B ion implantations into 4H-SiC and fabrication of pin diodes
Authors: Kimoto, Tsunenobu  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-6649-2090 (unconfirmed)
Miyamoto, Nao
Schoner, Adolf
Saitoh, Akira
Matsunami, Hiroyuki
Asano, Katsunori
Sugawara, Yoshitaka
Issue Date: 1-Apr-2002
Publisher: American Institute of Physics
Citation: T. Kimoto et al., J. Appl. Phys. 91, 4242-4248 (2002)
Journal title: Journal of Applied Physics
Volume: 91
Issue: 7
Start page: 4242
End page: 4248
Rights: Copyright 2002 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
URI: http://hdl.handle.net/2433/24202
DOI(Published Version): 10.1063/1.1459096
Link: Web of Science
Related Link: http://link.aip.org/link/?jap/91/4242
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