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Title: Simultaneous detection of vertical and lateral forces by bimodal AFM utilizing quartz tuning fork sensor with a long tip
Authors: Yamada, Yuya
Ichii, Takashi  kyouindb  KAKEN_id  orcid (unconfirmed)
Utsunomiya, Toru  kyouindb  KAKEN_id  orcid (unconfirmed)
Sugimura, Hiroyuki
Author's alias: 山田, 祐也
一井, 崇
宇都宮, 徹
杉村, 博之
Issue Date: 1-Sep-2019
Publisher: Japan Society of Applied Physics
Journal title: Japanese Journal of Applied Physics
Volume: 58
Issue: 9
Thesis number: 095003
Abstract: Simultaneous detection of vertical and lateral forces at the nanoscale by atomic force microscopy (AFM) yields important knowledge on nanotribology. Although silicon (Si) cantilevers are capable of detecting both the forces, it has not been achieved by quartz tuning fork sensors including qPlus sensors. In this study, we found that the tip apex of the qPlus sensor with a long tip oscillates vertically at the lowest resonance frequency (ƒ₁) and laterally at the second lowest resonance frequency (ƒ₂) by the finite element method simulation. The lateral oscillation was experimentally confirmed by atomic resolution imaging, where the imaged atoms were apparently connected when increasing the oscillating amplitude at ƒ₂. We also demonstrated the nanometer-scale friction force measurement by using the developed bimodal AFM. The obtained result was in good agreement with the contact-mode lateral force microscopy utilizing a Si cantilever.
Rights: This is a peer-reviewed, un-copyedited version of an article accepted for publication/published in Japanese Journal of Applied Physics. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at
The full-text file will be made open to the public on 13 August 2020 in accordance with publisher's 'Terms and Conditions for Self-Archiving'.
This is not the published version. Please cite only the published version.
DOI(Published Version): 10.7567/1347-4065/ab3617
Appears in Collections:Journal Articles

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