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| ファイル | 記述 | サイズ | フォーマット | |
|---|---|---|---|---|
| jlmn.2018.01.0004.pdf | 624.99 kB | Adobe PDF | 見る/開く |
| タイトル: | Extremely Low Ablation Rate of Metals Using XeCl Excimer Laser |
| 著者: | Kusaba, Mitsuhiro Hashida, Masaki   https://orcid.org/0000-0003-4834-0138 (unconfirmed)Sakabe, Shuji |
| 著者名の別形: | 橋田, 昌樹 阪部, 周二 |
| キーワード: | laser ablation ablation threshold XeCl excimer laser metal ablation rate |
| 発行日: | Apr-2018 |
| 出版者: | Japan Laser Processing Society |
| 誌名: | Journal of Laser Micro/Nanoengineering |
| 巻: | 13 |
| 号: | 1 |
| 開始ページ: | 17 |
| 終了ページ: | 20 |
| 抄録: | Ablation thresholds for the metallic elements Ti, Mo, Pt, Au, and Al were investigated using a XeCl excimer laser in the fluence range of 0.1–20 J/cm2 . The ablation thresholds were estimated from the dependence of the ablation rate and the diameter of the crater produced by the laser irradiation on laser fluence. Two ablation thresholds obtained from the ablation rate dependence on fluence agreed well with those obtained from the diameter dependence. The lower ablation threshold is related to the threshold calculated using a one-dimensional thermal diffusion model. The results suggest that even at such extremely low ablation rates, melting plays an essential role in excimer laser ablation. |
| 著作権等: | Copyright 2018 Japan Laser Processing Society. This paper was published in [Mitsuhiro Kusaba, Masaki Hashida, Shuji Sakabe. (2018) Extremely Low Ablation Rate of Metals Using XeCl Excimer Laser. Journal of Laser Micro/Nanoengineering, 13(1), 17-20.] and is made available as an electronic reprint with permission of JLPS. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. |
| URI: | http://hdl.handle.net/2433/267861 |
| DOI(出版社版): | 10.2961/jlmn.2018.01.0004 |
| 出現コレクション: | 学術雑誌掲載論文等 |
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