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タイトル: Photo radiation pressure at resonance of frequency modulated micro cantilever
著者: Satoh, Nobuo
Oh, Jimin
Hikihara, Takashi  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-0029-4358 (unconfirmed)
著者名の別形: 佐藤, 宣夫
引原, 隆士
キーワード: photo detection
MEMS
cantilever
photo pressure
frequency modulation
発行日: 2021
出版者: Institute of Electronics, Information and Communications Engineers (IEICE)
誌名: Nonlinear Theory and Its Applications, IEICE
巻: 12
号: 4
開始ページ: 718
終了ページ: 725
抄録: We demonstrated high-sensitivity measurement of photo-radiation pressure by applying frequency modulation (FM) detection for the resonance phenomenon of the micro-cantilever structure. We constructed a system to detect minute displacements using the optical-lever method and achieved a noise density of approximately 1pm/√Hz from the thermal vibration measurement. The resonance frequency shift was positive, which meant repulsive forces acted on the metal surface by way of the force generated due to incidence of the laser beam on the stainless-steel (SS) cantilever. For an incident light of 1mW intensity, a vibration amplitude of 0.687 nm and a radiation pressure of 0.378µN were measured experimentally.
著作権等: © 2021 The Institute of Electronics, Information and Communication Engineers
URI: http://hdl.handle.net/2433/269477
DOI(出版社版): 10.1587/nolta.12.718
出現コレクション:学術雑誌掲載論文等

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