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ファイル | 記述 | サイズ | フォーマット | |
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nolta.12.718.pdf | 1.29 MB | Adobe PDF | 見る/開く |
タイトル: | Photo radiation pressure at resonance of frequency modulated micro cantilever |
著者: | Satoh, Nobuo Oh, Jimin Hikihara, Takashi ![]() ![]() ![]() |
著者名の別形: | 佐藤, 宣夫 引原, 隆士 |
キーワード: | photo detection MEMS cantilever photo pressure frequency modulation |
発行日: | 2021 |
出版者: | Institute of Electronics, Information and Communications Engineers (IEICE) |
誌名: | Nonlinear Theory and Its Applications, IEICE |
巻: | 12 |
号: | 4 |
開始ページ: | 718 |
終了ページ: | 725 |
抄録: | We demonstrated high-sensitivity measurement of photo-radiation pressure by applying frequency modulation (FM) detection for the resonance phenomenon of the micro-cantilever structure. We constructed a system to detect minute displacements using the optical-lever method and achieved a noise density of approximately 1pm/√Hz from the thermal vibration measurement. The resonance frequency shift was positive, which meant repulsive forces acted on the metal surface by way of the force generated due to incidence of the laser beam on the stainless-steel (SS) cantilever. For an incident light of 1mW intensity, a vibration amplitude of 0.687 nm and a radiation pressure of 0.378µN were measured experimentally. |
著作権等: | © 2021 The Institute of Electronics, Information and Communication Engineers |
URI: | http://hdl.handle.net/2433/269477 |
DOI(出版社版): | 10.1587/nolta.12.718 |
出現コレクション: | 学術雑誌掲載論文等 |

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