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タイトル: Anomalous Grazing Incidence Small-Angle Scattering of Capped Ge Nanodots at the Si K Absorption Edge
著者: Okuda, Hiroshi  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0001-7866-4876 (unconfirmed)
Kato, Masayuki
Ochiai, Shojiro
Kitajima, Yoshinori
著者名の別形: 奥田, 浩司
落合, 庄治郎
発行日: Dec-2009
出版者: IOP Publishing
誌名: Applied Physics Express
巻: 2
号: 12
論文番号: 126501
抄録: Grazing incidence small-angle scattering (GISAXS) of capped Ge nanodots in the soft X-ray (SX) region using an anomalous dispersion effect at the Si K absorption edge has been analyzed and compared with results obtained using hard X-rays. The GISAXS profiles obtained at about 1.8 keV were found to give the same structure information for the nanodots as obtained from conventional GISAXS in the hard X-ray region. These could be explained by distorted wave Born approximation simulations. Enhancement of the contrast by anomalous dispersion was confirmed.
著作権等: This is an author-created, un-copyedited version of an article accepted for publication in 'Applied Physics Express'. The publisher is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.1143/APEX.2.126501.
The full-text file will be made open to the public on 20 November 2010 in accordance with publisher's 'Terms and Conditions for Self-Archiving'.
This is not the published version. Please cite only the published version. この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。
URI: http://hdl.handle.net/2433/274789
DOI(出版社版): 10.1143/APEX.2.126501
関連リンク: http://hdl.handle.net/2433/108965
出現コレクション:学術雑誌掲載論文等

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