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ファイル | 記述 | サイズ | フォーマット | |
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1757-899X_24_1_012015.pdf | 2.59 MB | Adobe PDF | 見る/開く |
タイトル: | Effect of Ewald sphere curvature on the GISAXS analysis of capped Germanium nanodot samples in the soft X-ray region |
著者: | Okuda, Hiroshi ![]() ![]() ![]() Takeshita, Kohki Kato, Masayuki Ochiai, Shojiro Kitajima, Yoshinori |
著者名の別形: | 奥田, 浩司 落合, 庄治郎 |
発行日: | Sep-2011 |
出版者: | IOP Publishing |
誌名: | IOP Conference Series: Materials Science and Engineering |
巻: | 24 |
論文番号: | 012015 |
抄録: | Use of soft X-rays (SX) for assessing three dimensional structures in thin films by grazing-incidence small-angle X-ray scattering (GI-SAXS) has been discussed with an example of Ge nanodot structures grown on (001) Si substrates and capped with Si. GISAXS patterns obtained by the measurements were compared with model calculations, and several characteristic differences between GISAXS in the SX and that in hard X-rays have been discussed. It was concluded that although the curvature of the Ewald sphere slightly affects the two-dimensional GISAXS profiles, a two dimensional detector can be still used at the photon energy of about 2 keV. On the other hand, such effect may become dominant when the size of the nanostructure becomes smaller and the photon energy decreases. |
記述: | Buried Interface Sciences with X-rays and Neutrons 2010 25–27 July 2010, Nagoya |
著作権等: | Published under licence by IOP Publishing Ltd This is an open access article. |
URI: | http://hdl.handle.net/2433/274792 |
DOI(出版社版): | 10.1088/1757-899X/24/1/012015 |
出現コレクション: | 学術雑誌掲載論文等 |
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