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タイトル: | Surface potential and local conductivity measurements of micropatterned aromatic monolayers covalently attached to n-Si(111) via Si-C and Si-O bonds |
著者: | Garcia, Maria Carmela T. Utsunomiya, Toru https://orcid.org/0000-0002-0023-7812 (unconfirmed) Ichii, Takashi https://orcid.org/0000-0002-4021-8894 (unconfirmed) Sugimura, Hiroyuki |
著者名の別形: | 宇都宮, 徹 一井, 崇 杉村, 博之 |
発行日: | Sep-2022 |
出版者: | IOP Publishing |
誌名: | Japanese Journal of Applied Physics |
巻: | 61 |
号: | SL |
論文番号: | SL1006 |
抄録: | The surface potentials and local conductivity of self-assembled monolayers (SAMs) formed using aromatic molecules covalently bonded to n-type silicon (111) via Si–C and Si–O bonds were measured using Kelvin probe force microscopy (KPFM) and conductive AFM (CAFM). Surface potential measurements were done using micropatterned SAMs with hexadecyl SAM as a reference to eliminate surface potential variations due to the cantilever tips. Micropatterning was conducted via vacuum ultraviolet photolithography at λ = 172 nm. Ellipsometry, X-ray photoelectron spectroscopy, static water contact angle and atomic force microscopy tests show that the aromatic SAMs were well-organized despite the short molecular lengths of the precursors. KPFM results show that Si–C bonded SAMs have higher surface potentials compared to Si–O SAMs, which is in agreement with dipole moments estimated by Molecular Orbital Package semi-empirical computations. CAFM scans showed conductive domains for the aromatic SAM regions, and Si–O SAMs exhibited a higher current than Si–C SAMs. |
著作権等: | This is the Accepted Manuscript version of an article accepted for publication in Japanese Journal of Applied Physics. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.35848/1347-4065/ac66c0. The full-text file will be made open to the public on 14 June 2023 in accordance with publisher's 'Terms and Conditions for Self-Archiving'. This is not the published version. Please cite only the published version. この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。 |
URI: | http://hdl.handle.net/2433/275829 |
DOI(出版社版): | 10.35848/1347-4065/ac5b9d |
出現コレクション: | 学術雑誌掲載論文等 |
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