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このアイテムのファイル:
| ファイル | 記述 | サイズ | フォーマット | |
|---|---|---|---|---|
| j.ijfatigue.2022.106983.pdf | 1.67 MB | Adobe PDF | 見る/開く |
| タイトル: | Effect of fabrication process on fracture strength and fatigue life of micromirrors made from single-crystal silicon |
| 著者: | Xia, Yuanlin Suzuki, Makoto Xue, Peidong Hirai, Yoshikazu    https://orcid.org/0000-0003-0835-7314 (unconfirmed)Tsuchiya, Toshiyuki https://orcid.org/0000-0002-7846-5831 (unconfirmed) |
| 著者名の別形: | 夏, 园林 鈴木, 誠 平井, 義和 土屋, 智由 |
| キーワード: | Fabrication process Fracture strength Fatigue life Torsional beam Micromirror |
| 発行日: | Sep-2022 |
| 出版者: | Elsevier BV |
| 誌名: | International Journal of Fatigue |
| 巻: | 162 |
| 論文番号: | 106983 |
| 抄録: | We evaluated the effects of the source wafers [bare silicon (Si) and silicon-on-insulator (SOI)] and fabrication process on the fracture strength and fatigue life of micromirrors. The fracture strength of the Si-made micromirrors was 10–30% lower than that of the SOI-made ones. The decrease in strength was caused by the sidewall roughness. The low fracture strength shortened the fatigue life of the Si-made mirrors, but there is no significant difference in fatigue exponents between the Si- and SOI-made samples. By improving the fabrication process, we will be able to realize highly reliable Si-made micromirrors at a low cost. |
| 著作権等: | © 2022. This manuscript version is made available under the CC-BY-NC-ND 4.0 license https://creativecommons.org/licenses/by-nc-nd/4.0/ The full-text file will be made open to the public on 1 September 2024 in accordance with publisher's 'Terms and Conditions for Self-Archiving' This is not the published version. Please cite only the published version. この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。 |
| URI: | http://hdl.handle.net/2433/276141 |
| DOI(出版社版): | 10.1016/j.ijfatigue.2022.106983 |
| 出現コレクション: | 学術雑誌掲載論文等 |
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