Access count of this item: 159

Files in This Item:
File Description SizeFormat 
MEMS46641.2020.9056252.pdf1.21 MBAdobe PDFView/Open
Title: Electrostatic Micro Mirror Array with Batch-Fabricated Torsion Beam of Silicon Nanowire
Authors: Nakamura, Tomoya
Hirai, Yoshikazu  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0003-0835-7314 (unconfirmed)
Tabata, Osamu
Tsuchiya, Toshiyuki  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-7846-5831 (unconfirmed)
Author's alias: 中村, 友哉
平井, 義和
田畑, 修
土屋, 智由
Keywords: electrostatic
Micro mirror array
nonlinear vibration
torsional resonator
vertical comb
Issue Date: 2020
Publisher: IEEE
Journal title: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
Start page: 1157
End page: 1160
Abstract: A new design of arrayed micro mirror device for a high performance spatial light modulator of high resonant frequency, large deflection angle with high mechanical reliability has been proposed. The mirror has 100-μm square plate of 5 μm thick, which is suspended by thin silicon nanowire of about 1 μm thick and wide. The device was fabricated using Bosch process and isotropic plasma etching. We successfully demonstrated array operation of 4×4 devices at relatively low actuation voltage (~20 Vpp) and large mechanical deflection amplitude (~9°). However, the deviation of vibration amplitude was large among unit resonators. By fitting the frequency response to the Duffing equation we found that self-enhancing actuation force caused by nonlinearity of the vertical combs was a main reason.
Description: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), 18-22 Jan. 2020.
Rights: © 2020 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
This is not the published version. Please cite only the published version. この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。
URI: http://hdl.handle.net/2433/284804
DOI(Published Version): 10.1109/MEMS46641.2020.9056252
Appears in Collections:Journal Articles

Show full item record

Export to RefWorks


Export Format: 


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.