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| ファイル | 記述 | サイズ | フォーマット | |
|---|---|---|---|---|
| MEMS46641.2020.9056252.pdf | 1.21 MB | Adobe PDF | 見る/開く |
| タイトル: | Electrostatic Micro Mirror Array with Batch-Fabricated Torsion Beam of Silicon Nanowire |
| 著者: | Nakamura, Tomoya Hirai, Yoshikazu    https://orcid.org/0000-0003-0835-7314 (unconfirmed)Tabata, Osamu Tsuchiya, Toshiyuki https://orcid.org/0000-0002-7846-5831 (unconfirmed) |
| 著者名の別形: | 中村, 友哉 平井, 義和 田畑, 修 土屋, 智由 |
| キーワード: | electrostatic Micro mirror array nonlinear vibration torsional resonator vertical comb |
| 発行日: | 2020 |
| 出版者: | IEEE |
| 誌名: | 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) |
| 開始ページ: | 1157 |
| 終了ページ: | 1160 |
| 抄録: | A new design of arrayed micro mirror device for a high performance spatial light modulator of high resonant frequency, large deflection angle with high mechanical reliability has been proposed. The mirror has 100-μm square plate of 5 μm thick, which is suspended by thin silicon nanowire of about 1 μm thick and wide. The device was fabricated using Bosch process and isotropic plasma etching. We successfully demonstrated array operation of 4×4 devices at relatively low actuation voltage (~20 Vpp) and large mechanical deflection amplitude (~9°). However, the deviation of vibration amplitude was large among unit resonators. By fitting the frequency response to the Duffing equation we found that self-enhancing actuation force caused by nonlinearity of the vertical combs was a main reason. |
| 記述: | 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), 18-22 Jan. 2020. |
| 著作権等: | © 2020 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. This is not the published version. Please cite only the published version. この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。 |
| URI: | http://hdl.handle.net/2433/284804 |
| DOI(出版社版): | 10.1109/MEMS46641.2020.9056252 |
| 出現コレクション: | 学術雑誌掲載論文等 |
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