Downloads: 0

Files in This Item:
There are no files associated with this item.
Title: Specular surface morphology of 4H-SiC epilayers grown on (1120) face
Authors: Chen, ZY
Kimoto, T  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-6649-2090 (unconfirmed)
Matsunami, H
Keywords: silicon carbide (SiC)
chemical vapor deposition
surface morphology
atomic force microscopy
stacking fault
Issue Date: 1999
Publisher: JAPAN J APPLIED PHYSICS
Journal title: JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
Volume: 38
Issue: 12A
Start page: L1375
End page: L1378
URI: http://hdl.handle.net/2433/3299
DOI(Published Version): 10.1143/JJAP.38.L1375
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

Show full item record

Export to RefWorks


Export Format: 


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.