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Title: | Specular surface morphology of 4H-SiC epilayers grown on (1120) face |
Authors: | Chen, ZY Kimoto, T https://orcid.org/0000-0002-6649-2090 (unconfirmed) Matsunami, H |
Keywords: | silicon carbide (SiC) chemical vapor deposition surface morphology atomic force microscopy stacking fault |
Issue Date: | 1999 |
Publisher: | JAPAN J APPLIED PHYSICS |
Journal title: | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS |
Volume: | 38 |
Issue: | 12A |
Start page: | L1375 |
End page: | L1378 |
URI: | http://hdl.handle.net/2433/3299 |
DOI(Published Version): | 10.1143/JJAP.38.L1375 |
Link: | Web of Science |
Appears in Collections: | Graduate School of Engineering Literature Database |
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