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    Please use this identifier to cite or link to this item: http://hdl.handle.net/2433/36029
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Title: Moving mask UV lithography for three-dimensional structuring
Authors: Hirai, Y  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0003-0835-7314 (unconfirmed)
Inamoto, Y
Sugano, K
Tsuchiya, T  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-7846-5831 (unconfirmed)
Tabata, O  KAKEN_id
Issue Date: 2007
Publisher: IOP PUBLISHING LTD
Journal title: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume: 17
Issue: 2
Start page: 199
End page: 206
URI: http://hdl.handle.net/2433/36029
DOI(Published Version): 10.1088/0960-1317/17/2/003
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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