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|Title:||Numerical analysis of the electromagnetic fields in a microwave plasma source excited by azimuthally symmetric surface waves|
|Keywords:||high-density plasma source|
azimuthally symmetric surface waves
|Publisher:||INST PURE APPLIED PHYSICS|
|Journal title:||JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS|
|Link:||Web of Science|
|Appears in Collections:||Graduate School of Engineering Literature Database|
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