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Title: Numerical analysis of the electromagnetic fields in a microwave plasma source excited by azimuthally symmetric surface waves
Authors: Kousaka, H
Ono, K  KAKEN_id
Keywords: high-density plasma source
microwave injection
azimuthally symmetric surface waves
FDTD
dispersion relation
Issue Date: 2002
Publisher: INST PURE APPLIED PHYSICS
Journal title: JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Volume: 41
Issue: 4A
Start page: 2199
End page: 2206
URI: http://hdl.handle.net/2433/5152
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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