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Title: High-precision alignment and bonding system for the fabrication of 3-D nanostructures
Authors: Kawashima, Shoichi
Imada, Masahiro
Ishizaki, Kenji  kyouindb  KAKEN_id
Noda, Susumu  kyouindb  KAKEN_id
Keywords: microassembly
micromachining
nanostructure
nanotechnology
periodic structure
photonic crystal
wafer bonding
3-D integration
Issue Date: Oct-2007
Publisher: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Journal title: Journal of Microelectromechanical Systems
Volume: 16
Issue: 5
Start page: 1140
End page: 1144
Rights: (c)2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
URI: http://hdl.handle.net/2433/54614
DOI(Published Version): 10.1109/JMEMS.2007.904950
Appears in Collections:Journal Articles

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