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Title: | Rate-determining process in chemical vapor deposition of SiC on off-axis alpha-SiC (0001) |
Authors: | Nakamura, S Kimoto, T https://orcid.org/0000-0002-6649-2090 (unconfirmed) Matsunami, H |
Keywords: | chemical vapor deposition processes semiconducting silicon compounds |
Issue Date: | 2004 |
Publisher: | ELSEVIER SCIENCE BV |
Journal title: | JOURNAL OF CRYSTAL GROWTH |
Volume: | 270 |
Issue: | 3-4 |
Start page: | 455 |
End page: | 461 |
URI: | http://hdl.handle.net/2433/6148 |
DOI(Published Version): | 10.1016/j.jcrysgro.2004.06.049 |
Link: | Web of Science |
Appears in Collections: | Graduate School of Engineering Literature Database |
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