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Title: Quantum chemical study on decomposition and polymer deposition in perfluorocarbon plasmas: Molecular orbital calculations of excited states of perfluorocarbons
Authors: Nakamura, T
Motomura, H
Tachibana, K
Keywords: quantum chemistry
perfluorocarbon
ab initio molecular orbital calculation
excited state
fluorocarbon plasma
polymer deposition
two-double-bonded perfluorocarbon
one-triple-bonded perfluorocarbon
aromatic perfluorocarbon
Issue Date: 2001
Publisher: INST PURE APPLIED PHYSICS
Journal title: JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Volume: 40
Issue: 2A
Start page: 847
End page: 854
URI: http://hdl.handle.net/2433/6163
DOI(Published Version): 10.1143/JJAP.40.847
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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