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Title: Reaction mechanism of a lanthanum precursor in liquid source metalorganic chemical vapor deposition
Authors: Nakamura, T
Nishimura, T
Tai, R
Tachibana, K
Keywords: lanthanum
chemical vapor deposition
infrared absorption spectroscopy
Issue Date: 2005
Publisher: ELSEVIER SCIENCE SA
Journal title: MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
Volume: 118
Issue: 1-3
Start page: 253
End page: 258
URI: http://hdl.handle.net/2433/6167
DOI(Published Version): 10.1016/j.mseb.2004.12.038
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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