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| Title: | Versatile method of submicroparticle pattern formation using self-assembly and two-step transfer |
| Authors: | Ozaki, Takashi Sugano, Koji Tsuchiya, Toshiyuki    https://orcid.org/0000-0002-7846-5831 (unconfirmed)Tabata, Osamu |
| Keywords: | nanodevice nanoparticle polydimethylsiloxane (PDMS) self-assembled monolayer (SAM) self-assembly template transfer |
| Issue Date: | 2007 |
| Publisher: | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| Journal title: | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS |
| Volume: | 16 |
| Issue: | 3 |
| Start page: | 746 |
| End page: | 752 |
| URI: | http://hdl.handle.net/2433/67448 |
| DOI(Published Version): | 10.1109/JMEMS.2007.897091 |
| Link: | Web of Science |
| Appears in Collections: | Graduate School of Engineering Literature Database |
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