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| Title: | High-cycle fatigue of micromachined single crystal silicon measured using a parallel fatigue test system |
| Authors: | Ikehara, Tsuyoshi Tsuchiya, Toshiyuki    https://orcid.org/0000-0002-7846-5831 (unconfirmed) |
| Keywords: | fatigue test silicon MEMS lifetime S-N curve resonator |
| Issue Date: | 2007 |
| Publisher: | IEICE-INST ELECTRONICS INFORMATION COMMUNICATIONS ENG |
| Journal title: | IEICE ELECTRONICS EXPRESS |
| Volume: | 4 |
| Issue: | 9 |
| Start page: | 288 |
| End page: | 293 |
| URI: | http://hdl.handle.net/2433/67450 |
| DOI(Published Version): | 10.1587/elex.4.288 |
| Link: | Web of Science |
| Appears in Collections: | Graduate School of Engineering Literature Database |
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