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Title: Scanning capacitance microscopy for alkylsilane-monolayer-covered Si substrate patterned by scanning probe lithography
Authors: Han, Jiwon
Lee, Kyung-Hwang
Fujii, Shosuke
Sano, Hikaru
Kim, Young-Jong
Murase, Kumaki  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-7564-9416 (unconfirmed)
Ichii, Takashi  kyouindb  KAKEN_id
Sugimura, Hiroyuki  kyouindb  KAKEN_id
Keywords: scanning capacitance microscopy (SCM)
self-assembled monolayer (SAM)
Kelvin-probe force microscopy (KFM)
charge trap
nanolithography
Issue Date: 2007
Publisher: INST PURE APPLIED PHYSICS
Journal title: JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
Volume: 46
Issue: 8B
Start page: 5621
End page: 5625
URI: http://hdl.handle.net/2433/67518
DOI(Published Version): 10.1143/JJAP.46.5621
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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