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Title: | Impact of surface step heights of 6H-SiC (0001) vicinal substrates in heteroepitaxial growth of 2H-AlN |
Authors: | Okumura, H Horita, M Kimoto, T https://orcid.org/0000-0002-6649-2090 (unconfirmed) Suda, J |
Keywords: | AlN SiC MBE XRD surface control |
Issue Date: | 2008 |
Publisher: | ELSEVIER SCIENCE BV |
Journal title: | APPLIED SURFACE SCIENCE |
Volume: | 254 |
Issue: | 23 |
Start page: | 7858 |
End page: | 7860 |
URI: | http://hdl.handle.net/2433/78608 |
DOI(Published Version): | 10.1016/j.apsusc.2008.02.165 |
Link: | Web of Science |
Appears in Collections: | Graduate School of Engineering Literature Database |
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