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Title: Impact of surface step heights of 6H-SiC (0001) vicinal substrates in heteroepitaxial growth of 2H-AlN
Authors: Okumura, H
Horita, M
Kimoto, T  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-6649-2090 (unconfirmed)
Suda, J  KAKEN_id
Keywords: AlN
SiC
MBE
XRD
surface control
Issue Date: 2008
Publisher: ELSEVIER SCIENCE BV
Journal title: APPLIED SURFACE SCIENCE
Volume: 254
Issue: 23
Start page: 7858
End page: 7860
URI: http://hdl.handle.net/2433/78608
DOI(Published Version): 10.1016/j.apsusc.2008.02.165
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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