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    Please use this identifier to cite or link to this item: http://hdl.handle.net/2433/78746
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Title: Micro/nanoimprinting of glass under high temperature using a CVD diamond mold
Authors: Komori, M  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0001-8696-8167 (unconfirmed)
Uchiyama, H
Takebe, H
Kusuura, T
Kobayashi, K
Kuwahara, H
Tsuchiya, T  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-7846-5831 (unconfirmed)
Issue Date: 2008
Publisher: IOP PUBLISHING LTD
Journal title: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume: 18
Issue: 6
Thesis number: 065013
URI: http://hdl.handle.net/2433/78746
DOI(Published Version): 10.1088/0960-1317/18/6/065013
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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