Access count of this item: 0
Files in This Item:
There are no files associated with this item.
Title: | High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned specimens |
Authors: | Ikehara, T Tsuchiya, T ![]() ![]() ![]() |
Issue Date: | 2008 |
Publisher: | IOP PUBLISHING LTD |
Journal title: | JOURNAL OF MICROMECHANICS AND MICROENGINEERING |
Volume: | 18 |
Issue: | 7 |
Thesis number: | 075004 |
URI: | http://hdl.handle.net/2433/78961 |
DOI(Published Version): | 10.1088/0960-1317/18/7/075004 |
Link: | Web of Science |
Appears in Collections: | Graduate School of Engineering Literature Database |

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.