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Title: High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned specimens
Authors: Ikehara, T
Tsuchiya, T  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-7846-5831 (unconfirmed)
Issue Date: 2008
Publisher: IOP PUBLISHING LTD
Journal title: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume: 18
Issue: 7
Thesis number: 075004
URI: http://hdl.handle.net/2433/78961
DOI(Published Version): 10.1088/0960-1317/18/7/075004
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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