Access count of this item: 0
Files in This Item:
There are no files associated with this item.
| Title: | Mechanical calibration of MEMS springs with sub-micro-Newton force resolution |
| Authors: | Miyamoto, Kenji Jornori, Tomoya Sugano, Koji Tabata, Osamu  Tsuchiya, Toshiyuki   https://orcid.org/0000-0002-7846-5831 (unconfirmed) |
| Keywords: | calibration spring constant folded beam single-crystal silicon |
| Issue Date: | 2008 |
| Publisher: | ELSEVIER SCIENCE SA |
| Journal title: | SENSORS AND ACTUATORS A-PHYSICAL |
| Volume: | 143 |
| Issue: | 1 |
| Start page: | 136 |
| End page: | 142 |
| URI: | http://hdl.handle.net/2433/78964 |
| DOI(Published Version): | 10.1016/j.sna.2007.10.042 |
| Link: | Web of Science |
| Appears in Collections: | Graduate School of Engineering Literature Database |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.