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Title: Young's modulus, fracture strain, and tensile strength of sputtered titanium thin films
Authors: Tsuchiya, T  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-7846-5831 (unconfirmed)
Hirata, M
Chiba, N
Keywords: titanium
mechanical properties
tensile test
internal stress
Young's modulus
Issue Date: 2005
Publisher: ELSEVIER SCIENCE SA
Journal title: THIN SOLID FILMS
Volume: 484
Issue: 1-2
Start page: 245
End page: 250
URI: http://hdl.handle.net/2433/7946
DOI(Published Version): 10.1016/j.tsf.2005.02.024
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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