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Title: Formation of epitaxial mesa structures on 4H-SiC (0001) and (11(2)over-bar-0) substrates
Authors: Chen, Y
Kimoto, T  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-6649-2090 (unconfirmed)
Takeuchi, Y
Matsunami, H
Keywords: 3C-SiC inclusions
anisotropy
homoepitaxy
lateral growth
mesa structures
Issue Date: 2002
Publisher: TRANS TECH PUBLICATIONS LTD
Journal title: SILICON CARBIDE AND RELATED MATERIALS 2001, PTS 1 AND 2, PROCEEDINGS
Volume: 389-3
Start page: 255
End page: 258
URI: http://hdl.handle.net/2433/8731
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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