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Title: Fast epitaxial growth of high-quality 4H-SiC by vertical hot-wall CVD
Authors: Fujihira, K
Kimoto, T  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-6649-2090 (unconfirmed)
Matsunami, H
Keywords: deep level transient spectroscopy
fast epitaxy
morphology
photoluminescence
Issue Date: 2002
Publisher: TRANS TECH PUBLICATIONS LTD
Journal title: SILICON CARBIDE AND RELATED MATERIALS - 2002
Volume: 433-4
Start page: 161
End page: 164
URI: http://hdl.handle.net/2433/8740
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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