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Title: | Recent achievements and future challenges in SiC homoepitaxial growth |
Authors: | Kimoto, T https://orcid.org/0000-0002-6649-2090 (unconfirmed) Nakazawa, S Fujihira, K Hirao, T Nakamura, S Chen, Y Hashimoto, K Matsunami, H |
Keywords: | (0338) plane (1120) plane deep-level homoepitaxial growth hot-wall CVD impurity doping |
Issue Date: | 2002 |
Publisher: | TRANS TECH PUBLICATIONS LTD |
Journal title: | SILICON CARBIDE AND RELATED MATERIALS 2001, PTS 1 AND 2, PROCEEDINGS |
Volume: | 389-3 |
Start page: | 165 |
End page: | 170 |
URI: | http://hdl.handle.net/2433/8793 |
Link: | Web of Science |
Appears in Collections: | Graduate School of Engineering Literature Database |
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