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Title: Recent achievements and future challenges in SiC homoepitaxial growth
Authors: Kimoto, T  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-6649-2090 (unconfirmed)
Nakazawa, S
Fujihira, K
Hirao, T
Nakamura, S
Chen, Y
Hashimoto, K
Matsunami, H
Keywords: (0338) plane
(1120) plane
deep-level
homoepitaxial growth
hot-wall CVD
impurity doping
Issue Date: 2002
Publisher: TRANS TECH PUBLICATIONS LTD
Journal title: SILICON CARBIDE AND RELATED MATERIALS 2001, PTS 1 AND 2, PROCEEDINGS
Volume: 389-3
Start page: 165
End page: 170
URI: http://hdl.handle.net/2433/8793
Link: Web of Science
Appears in Collections:Graduate School of Engineering Literature Database

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