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Title: | Surface mechanisms in homoepitaxial growth on alpha-SiC {0001}-vicinal faces |
Authors: | Nakamura, S Kimoto, T https://orcid.org/0000-0002-6649-2090 (unconfirmed) Matsunami, H |
Keywords: | chemical vapor deposition (CVD) homoepitaxial growth {0001}-vicinal faces atomic force-microscopy (AFM) surface step structures |
Issue Date: | 2004 |
Publisher: | TRANS TECH PUBLICATIONS LTD |
Journal title: | SILICON CARBIDE AND RELATED MATERIALS 2003, PTS 1 AND 2 |
Volume: | 457-460 |
Start page: | 163 |
End page: | 168 |
URI: | http://hdl.handle.net/2433/8830 |
Link: | Web of Science |
Appears in Collections: | Graduate School of Engineering Literature Database |
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