Downloads: 0
Files in This Item:
There are no files associated with this item.
| Title: | 4H-SiC epitaxial growth on SiC substrates with various off-angles |
| Authors: | Saitoh, H Kimoto, T    https://orcid.org/0000-0002-6649-2090 (unconfirmed) |
| Keywords: | homoepitaxial growth off-angle chemical vapor deposition C/Si ratio carrier concentration |
| Issue Date: | 2005 |
| Publisher: | TRANS TECH PUBLICATIONS LTD |
| Journal title: | SILICON CARBIDE AND RELATED MATERIALS 2004 |
| Volume: | 483 |
| Start page: | 89 |
| End page: | 92 |
| URI: | http://hdl.handle.net/2433/8861 |
| Link: | Web of Science |
| Appears in Collections: | Graduate School of Engineering Literature Database |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.