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書誌情報ファイル
Film precursor formation in metalorganic chemical vapor deposition of barium strontium titanate films: A study by microdischarge optical emission spectroscopy
  Momose, S; Nakamura, T; Tachibana, K (2002)
  JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 41(2A): 778-783
Diagnosis of oxidation reactions in metalorganic chemical vapor deposition of (Ba,Sr)TiO3 films by in situ Fourier transform infrared spectroscopy
  Momose, S; Sahara, R; Nakamura, T; Tachibana, K (2001)
  JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 40(9B): 5501-5506
Quantum chemical study on chemical vapor deposition source molecules for the deposition of (Ba,Sr)TiO3 films: Infrared band identifications by density functional calculations
  Nakamura, T; Tachibana, K (2001)
  JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 40(1): 338-345
Effects of gas-phase thermal decompositions of chemical vapor deposition source molecules on the deposition of (Ba, Sr)TiO3 films: A study by in situ Fourier transform infared spectroscopy
  Momose, S; Nakamura, T; Tachibana, K (2000)
  JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 39(9B): 5384-5388
Reaction mechanism of alkoxy derivatives of titanium diketonates as source molecules in liquid source metalorganic chemical vapor deposition of (Ba,Sr)TiO3 films: A study by in situ infrared absorption spectroscopy
  Nakamura, T; Momose, S; Sahara, R; Tachibana, K (2002)
  JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 41(11B): 6624-6627
Microdischarge optical emission spectroscopy as a novel diagnostic tool for metalorganic chemical vapor deposition of (Ba,Sr)TiO3 films
  Momose, S; Nakamura, T; Tachibana, K (2000)
  JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 39(2A): 555-559

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